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  2. ZEUS
ZEUS

In Line Solutions

设备
CF / CELL
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DETAIL
相关式样及精度规格，可配合客户需求调整。详情请洽业务单位。
Conveyor
Logistics transfer system by Roller driving.
Turn Over
Logistics transfer system which rotates the substrate 180 degrees.
Turn Align
Logistics transfer system which changes the proceeding direction of the substrate.
Buffer
Logistics transfer system with substrate flow stagnant and cooling concept.
CIM (Computer Integrated Manufacturing)
This is an optimized production management system which manages and monitors process data that occurred in the equipment and transfer line and transmits/receives with HOST in real time by SECS (Semi Equipment Communication Standard) Protocol.
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